AI & HPC ADVANCED PACKAGING

Silicon & Glass Interposer
Fabrication for AI Accelerators

Full-stack 2.5D and 3D interposer packaging - TSV, TGV, RDL, hybrid bonding, and micro-bumps - from a single pure-play foundry. Prototype to production. Single wafer to volume.

2.5D Si Interposer 3D Hybrid Bonding Glass TGV TSV >50:1 RDL Cu Damascene AuSn Bumping 1 Wafer Minimum
PACKAGE SUBSTRATE C4 bumps SILICON INTERPOSER TSVs RDL µ-bumps GPU / TPU Die AI ACCELERATOR LOGIC HBM STACK ← High-bandwidth interconnect → 2.5D INTERPOSER CROSS-SECTION
>50:1
TSV aspect
ratio (DRIE)
30µm
Min. TGV
via diameter
±1µm
Hybrid Cu-Cu
bond align.
Gen.4
Panel size
730×920mm
TSV aspect ratio >50:1
TGV vias from 30µm dia.
Hybrid Cu-Cu bonding ±1µm
Panels up to Gen.4 (730×920mm)
No minimum order
Full quote in 7–10 business days
TSV aspect ratio >50:1
TGV vias from 30µm dia.
Hybrid Cu-Cu bonding ±1µm
Panels up to Gen.4 (730×920mm)
No minimum order
Full quote in 7–10 business days
The Challenge
AI silicon needs a new kind of packaging partner.
THE BOTTLENECK

Packaging capacity is the constraint

Every next-generation AI accelerator - from GPUs to custom TPUs - requires high-density silicon interposers to connect logic dies with HBM memory stacks. But major OSATs have long lead times, high minimum volumes, and limited flexibility for development lots. For startups and scaling AI chip companies, this means months of delays at the most critical phase of the product cycle: first silicon validation and early production ramp.

OUR APPROACH

Single-source interposer partner, single wafer to volume

As a pure-play foundry, Nanosystems JP Inc. manages your complete interposer process flow through one project - covering TSV/TGV etching, copper fill, RDL patterning, and bonding through to final bumped wafer delivery. No minimum order quantity. No multi-vendor coordination. Development lots start from a single wafer, quotes within 7–10 business days, and mutual NDA protection from first inquiry.

Silicon Interposer
High-density TSV interposers for AI & HPC.

For GPU/HBM integration, chiplet architectures, and high-bandwidth computing applications requiring the densest possible interconnect.

TSV Fabrication

High aspect ratio through-silicon vias by DRIE Bosch process with conformal dielectric isolation, Ti/Cu barrier-seed deposition, and void-free bottom-up copper electroplating.

Aspect ratio>50:1
Via diameter5–100 µm
Cu fillVoid-free
CMPEndpoint-controlled
Process details →

TSV Reveal

Complete via-last reveal process: temporary bonding to carrier wafer, backgrinding to target thickness, dry etch Cu exposure, and dielectric deposition with final CMP.

ProcessTemp bond + backgrind
Cu exposureDry etch reveal
PassivationDielectric + CMP

RDL Fabrication

Redistribution layer patterning via single and double Cu damascene processes with polymer passivation layers. Enables fine-pitch fan-out routing between die and TSV arrays.

ProcessCu damascene
LayersSingle & double
PassivationPolymer

Hybrid Bonding

Dielectric-to-dielectric and metal-to-metal Cu-Cu bonding for highest-density 3D die stacking. Enables interconnect pitches below 10µm moving toward sub-1µm.

Alignment±1 µm
MethodCu-Cu thermo-compression
InspectionC-SAM verified
Glass Interposer
TGV interposers for RF, photonics, and panel scale.

When your application demands superior RF insulation, tunable CTE, optical transparency, or panel-level cost economics.

TGV Fabrication

Through-glass via formation with four profile options - hourglass, straight, tapered, and blind (BGV) - to match your interconnect and deposition requirements.

Aspect ratioUp to 10:1
Min. diameter30 µm
Via profiles4 types
SubstrateWafer & panel
Process details →

Copper Metallization

Both conformal Cu coating (thin-wall lining for signal routing) and complete void-free Cu fill (solid plug for power delivery and thermal paths). Barrier/seed by PVD.

Fill modesConformal · Complete
Cu qualityVoid-free
BarrierTi / TaN PVD

Panel-Level Processing

Process glass substrates at panel scale - up to Gen.4 (730×920mm) - yielding 5–8× more interposers per run versus 300mm silicon wafers. Fundamentally changes the cost-per-interposer equation.

Max panel730×920mm (Gen.4)
StandardUp to 550×650mm
Yield advantage5–8× vs. Si wafer
Choose the Right Substrate
Silicon or glass? We fabricate both.

Two interposer platforms, one foundry. We help you select the right substrate for your application - or prototype both.

PropertySilicon InterposerGlass Interposer
Best forAI/HPC, HBM, chipletsRF/mmWave, photonics, AiP
Via technologyTSV (DRIE)TGV (laser / etch)
Max aspect ratio>50:1Up to 10:1
Min. via diameter5 µm30 µm
RF loss tangentHigh (semiconductor)Very low (insulator)
CTE~2.6 ppm/°C (fixed)3–9 ppm/°C (tunable)
Optical transparencyOpaqueTransparent (visible + NIR)
Max substrate size300mm wafer730×920mm panel (Gen.4)
Cost at volumeHigher (wafer-level)Lower (panel-level)
Bonding optionsHybrid Cu-Cu, EutecticAnodic, Eutectic, Direct
Shared Capabilities
Full process support - available for both platforms.

Eutectic Bonding & Bumping

AuSn, AuGe, and AlGe eutectic wafer bonding for hermetic sealing. Micro-bump formation with UBM (Ti/Ni/Au, Ti/Pt/Au) for flip-chip assembly. Available for both silicon and glass interposer flows.

Bump pitch: 25–50 µm · Alloys: AuSn · AuGe · AlGe · Wafer sizes: 4″–12″

Core Wafer Processing

Full process range: photolithography (i-line / KrF stepper), thin-film deposition (PVD, PECVD, ALD), DRIE and wet etch, CMP, electroplating, ion implantation, wafer grinding.

Lithography: i-line · KrF · Deposition: PVD, PECVD, ALD

Mask Design & CAD

GDS layout, DRC verification, and photomask fabrication. Accept any format - GDS · DXF · DWG, or customer drawings. Turnaround: 3–5 business days.

Formats: GDS · DXF · DWG · Turnaround: 3–5 days
End-to-End Flow
From Your Design to Bonded Die Stack
1
Mask Design
GDS layout, DRC verification, photomask fabrication
2
Via Etch
TSV (DRIE) or TGV (laser/etch), dielectric, barrier/seed, Cu fill, CMP
3
Via Reveal
Temp bond, backgrind, expose, passivate (via-last)
4
RDL
Cu damascene routing + polymer passivation
5
Bumping
UBM deposition, micro-bump or AuSn formation
6
Bonding
Hybrid Cu-Cu, eutectic, or anodic wafer bonding
One purchase order. One point of contact. Complete traceability from mask design through final packaged wafer.
Technical Specifications
Full process parameters.

TSV Fabrication

Silicon interposer via process

Etch methodDRIE (Bosch process)
Aspect ratio>50:1
Via diameter5–100 µm
Via depth>100 µm
Dielectric linerPECVD SiO₂ · Al₂O₃ ALD
Barrier / seedTi/Cu PVD (TaN/Ta optional)
Cu fillVoid-free electroplating
CMP dishing<0.5 µm typical
Wafer size100mm–300mm

TGV & Glass Interposer

Glass interposer via process

Via formationLaser / wet etch
Aspect ratioUp to 10:1
Min. via diameter30 µm
Via profilesHourglass · Straight · Tapered · Blind
Cu fill modesConformal · Complete void-free
CTE range3–9 ppm/°C (tunable)
Panel sizesUp to 730×920mm (Gen.4)
Wafer sizes100mm–300mm
Bonding optionsAnodic · Eutectic · Direct
Built for AI Chip Programs
Why Nanosystems JP Inc.
1
Wafer Minimum
No MOQ

No minimum order quantity. Start with a single development wafer and scale to production volumes when ready.

7–10
Day Quotes
Full Technical Quote

Our engineers review your design and provide a detailed technical quote - process flow, timeline, and pricing - within 7–10 business days.

1
Vendor, Full Stack
Single Source

One project covers every process step. No multi-vendor handoffs, no finger-pointing between process steps.

NDA from Day One
IP Protected

Mutual NDA executed before any design data is shared. All IP handled confidentially with full traceability.

Applications
Who this is for.

GPU & TPU Interposers

Silicon interposers connecting AI accelerator logic dies with HBM memory stacks. High-density TSV arrays with >10,000 connections/mm² enable the bandwidth required for next-gen training and inference chips.

🧠

Custom AI ASICs

Startups and hyperscalers designing custom silicon for specific AI workloads need a packaging partner who accepts development quantities, iterates fast, and scales without re-qualifying the process at a new vendor.

📡

5G / mmWave & Co-Packaged Optics

Glass interposers for RF front-end modules and silicon photonics transceivers co-packaged with switch ASICs. Low-loss substrates for data center connectivity.

🔬

HBM Integration

Stacked DRAM integration with logic dies via silicon interposers. Fine-pitch micro-bumps and high-density TSVs deliver the memory bandwidth that AI workloads demand.

🖥️

HPC & Networking Chiplets

Multi-die configurations with heterogeneous process nodes unified on a single interposer. Both silicon and glass options available depending on bandwidth and RF requirements.

🔮

R&D & Prototyping

University research groups and R&D labs. Single-wafer prototyping with full foundry support and process flexibility unavailable from volume OSATs.

PROCESSES FOR AI & HPC Fabrication flow for silicon & glass interposer packaging

Submit your design.
Response within 1 business day.

Send us your GDS, process specifications, or even a concept sketch. Our engineers review personally and respond with a detailed technical quote including process flow, timeline, and pricing.

📧 sales@nanosystemsjp.co.jp
🔒 Mutual NDA available before data transfer
📋 All designs handled with full confidentiality
⏱ Response within 1 business day · Full quote within 7–10 days

sales@nanosystemsjp.co.jp · NDA available on request · All data handled confidentially

Technical AI — Nanosystems JP Inc.
Online — typically replies in minutes
Services & Industries
⚙️ Capabilities Overview
Substrates
🔷 Substrate & WafersSi, SiC, GaN, glass, sapphire 🔬 Fused Silica WafersQuartz · borosilicate · low CTE 🟣 PI Film & SUS Sensor FabRoll-to-roll · sensor patterning
Front-End
🎭 Mask FabricationGDS to chrome mask, DRC 📷 PhotolithographyE-beam 20 nm to 500×600 mm 🔬 NanoimprintingUV & thermal NIL 🫧 Thin Film DepositionPVD, CVD, ALD, MBE ⬆️ LiftoffMetal pattern · shadow mask ⚡ ElectroplatingCu TSV fill, DPC, LIGA 🌊 EtchingICP-RIE, DRIE >50:1 🔥 AnnealingN₂ / H₂ / vacuum / RTA ⚛️ Ion ImplantationB / P / As / Al / N implant 🔄 CMP & GrindingCu CMP, 50 µm thinning 💎 DicingBlade, stealth laser 🧪 Wafer CleaningRCA, plasma, megasonic
Advanced Packaging
🔗 Wafer BondingHybrid, eutectic, fusion 📌 TSV FabricationHigh AR, void-free Cu fill 👁️ TSV RevealBackgrind → etch → CMP 🪟 TGV FabricationThrough-glass via 🔀 RDL FabricationBCB / PBO / PI + damascene 📦 Packaging & AssemblyWire bond, flip-chip 📚 3D / 2.5D PackagingTSV + RDL + UBM + C4 🥇 AuSn BumpPVD lift-off, fluxless 🧬 Biochip & MicrofluidicsGlass 500×600 mm, NIL 🔆 SiPho PackagingTSV · RDL · UBM · C4 for PIC
Industries
🤖 AI & HPC PackagingCoWoS-style, 2.5D / 3D 💡 Silicon PhotonicsSOI · AuSn · TSV interposer 🚗 AutomotiveMEMS sensors, SiC power 🧬 Life SciencesLab-on-chip, biosensors 🔭 All Industries → Request a Quote →