Full Process Portfolio

Complete
Fabrication Capabilities

From GDSII to Diced Chip: The Seamless Path to Hardware Innovation

Nanosystems JP Inc. provides end-to-end semiconductor, MEMS, and nano-fabrication support, from substrate sourcing and mask preparation through front-end processing, advanced packaging, dicing, and final delivery. Projects range from single-process engagements to coordinated multi-step fabrication flows.

20+
20+ Process capabilities
100+
Depositable materials
2″-12″
Wafer size range
550×650mm
Max substrate size
End-to-End Process Coverage
Core Semiconductor Processes
Substrate
& Wafers
Si, Glass, SiC, GaN
Design &
Mask
GDS, DXF, Chrome
Photo-
lithography
20nm-4µm
Nano-
imprinting
UV & thermal NIL
Thin Film
Deposition
PVD, CVD, ALD
Liftoff
Patterning
Metal lift-off
Electro-
plating
Cu, Ni, Au, Sn
Etching
DRIE, ICP-RIE, Wet
Annealing
N2/H2/vacuum/RTA
Ion
Implant
Si, SiC, GaN
CMP &
Grinding
Planarization
Wafer
Cleaning
RCA · plasma · megasonic
Dicing &
Packaging
Blade, laser, stealth
Bumping · Metallization · Quantum
UBM
Deposition
Ti/Pt/Au · BLM
Gold
Bump
1-20 µm · TC/ACF
Indium
Bump
10µm pitch · FPA
AuGe / AuSi
Attach
356/363°C eutectic
High-Pb
C4
95/5 · low-alpha
SLID / TLP
Stacks
bond low, remelt high
Al-Ge
Sealing
424°C frames
Ohmic
Contacts
GaAs · GaN · RTA
Cryo & UHV
Metallization
AuSn · seal rings
Optical
Access
windows · meshes
MEMS Vapor
Cells
unfilled bodies
TFOI
Wafers
quartz-on-Si · custom LNOI
Quantum
Technology
platform overview
Advanced Packaging & Integration
Wafer
Bonding
Cu-Cu, Eutectic
TSV
Fabrication
High AR, Cu fill
TSV
Reveal
Backgrind + CMP reveal
TGV
Fabrication
20 µm dia, panels
RDL
Fabrication
Fan-in, Fan-out
Packaging
& Assembly
Wire bond, flip-chip
3D/2.5D
Packaging
TSV+RDL+UBM+C4
AuSn
Bump
PVD lift-off · fluxless
Biochip &
Microfluidics
Glass · Si · polymer
SiPho
Packaging
TSV · RDL · UBM · C4

View all 20+ processes and detailed specifications

Typical engagement models

How customers typically engage us

Single-process support

For customers with a defined flow who need one specific step such as DRIE, wafer bonding, plating, or dicing.

Multi-process prototyping

For R&D and proof-of-concept work requiring multiple coordinated fabrication steps under one project.

Advanced packaging builds

For TSV/TGV, redistribution, bonding, bumping, and wafer-level integration programs.

Pilot and low-volume production

For customers moving from early development toward repeatable manufacturing support.

What to send for feasibility review

Substrate material and size · Target process or sequence · Layer stack if known · Quantity · Target timeline · Drawings or design files if available (not required for first contact)

Ready to submit your specifications?
Our Technical Intake Portal guides you through each parameter step by step - select your process and the form adapts automatically.
Open Technical RFQ Portal →
Why it matters

The foundry, upgraded.

We have removed the friction from semiconductor fabrication. Precision engineering delivered with modern speed and full transparency.

Feature Traditional "Black Box" Foundry Nanosystems JP Inc. - Modern Foundry
Onboarding3-6 months (NDAs, credit checks, legal)48 hours (digital NDA and engineer review)
Minimum orderFull lot (25+ wafers)From 1-5 wafers for R&D
CommunicationAccount managers (sales-led)Technical engineers, initial engineering response review
Process controlRigid fixed menusCustomizable, optimized flows
Transparency"Wait for the shipping notice"Milestone updates from photolithography through to dicing
Full Capabilities

Complete Fabrication Capabilities

At Nanosystems JP Inc., we offer a complete range of semiconductor, MEMS, and nano-fabrication processes - from substrate procurement through front-end processes, back-end integration, and final assembly to diced chip, managed under a single project.

ProcessKey SpecificationsSubstrate / Size
CORE SEMICONDUCTOR PROCESSES
Substrate & Wafer SupplySi, Glass, SiC, GaN, GaAs, InP, InGaAs, Sapphire, Quartz, LiNbO₃ and more2″-12″ wafers · glass panels to 550×650mm
Design & Mask FabricationChrome-on-glass, quartz masks. GDS/DXF input. DRC + fracturing.Standard and large-format masks
PhotolithographyE-beam 20 nm · KrF stepper · Large-format stepper 4 µm (500×600 mm) · Mask aligner · X-ray LIGAUp to 12″ + panels to 500×600mm
Nanoimprinting (NIL)UV NIL 50nm · Thermal NIL · Large format 500×500mm · Mold fabrication (Si/Ni/quartz)Up to 500×500mm
Thin Film DepositionWafer Metallization & PVDPVD (sputtering, e-beam, ion plating) · CVD (LPCVD, PECVD) · ALD · MBE · Roll-to-roll · 100+ materialsUp to 500×600mm
TFT & Display BackplaneIGZO TFT · BG-ES architecture · Multi-layer metal wiring (up to 4 layers) · P-CVD dielectrics · Organic ILD · 5 µm L/S photolithographyGlass substrate · 0.5-0.7 mm · 100×100 mm to 400×300 mm
Electroplating & ElectroformingCu/Ni/Au/AuSn electroplating · TSV/TGV fill · LIGA Ni electroforming (1µm features)Up to 300mm + large panels
EtchingDeep Silicon Etching (DRIE)ICP-RIE (compound semi, SiC, waveguides) · RIE · DRIE (>50:1 AR, Bosch) · KOH/TMAH/BOE wet etchUp to 12″
AnnealingN₂ · H₂ · Vacuum · RTA ambient to 1200°C (1-400°C/s) · SiC high-temp anneal to 2000°C · 193 nm laser anneal · Furnace 350-1100°C · SiC carbon capUp to 12″
Ion ImplantationB, P, As, BF₂, Al, N and 50+ more · 0.1 keV to 100 MeV incl. PIII · Hot implant to 600°C · Samples to 300 mm · RTA to 1800°CChips to 300mm
CMP & Wafer GrindingMetal/insulator CMP · SiC/sapphire polishing · Pre-bonding CMP · Backgrinding to 50µmUp to 12″
DicingBlade and stealth laser dicing · tape and frame handlingUp to 300mm
ADVANCED PACKAGING
Wafer BondingHybrid (±1µm) · Thermocompression · Eutectic (AuSn/AuGe) · Fusion · Anodic · Glass frit · PDMSChips to 12″
TSV FabricationDRIE >100µm · Void-free Cu fill · Oxide liner (PE-TEOS/ALD) · Barrier/seed · CMPUp to 12″
TSV RevealTemporary bonding · Backgrinding · Dry etch reveal · SiN/SiO₂ deposition · CMPUp to 12″
TGV FabricationVia from 20µm · Aspect ratio 10:1 · SEM-verified fill · Cu fill · Double-sided RDL · BGV availableWafers + panels to 510×510mm
RDL FabricationPolymer passivation (BCB/PBO/PI) + Cu damascene (single + double) · Double-sided TGV RDLUp to 12″
Packaging & AssemblyDie/wire/flip-chip bonding · BEOL · UBM (ENIG/ENEPIG) · C4 bumping (Cu/CuSn/AuSn)Up to 12″
AuSn Bump Services (PIC)PVD multilayer + electroplating · 80/20 standard + custom · Ti/Ni/Au UBM · ENIG/ENEPIG4″-12″ incl. cavity wafers
SPECIALTY SERVICES
Biochip & Microfluidics SiPho Wafer-Level PackagingGlass/Si/polymer chips · PDMS soft litho · Injection molding · Organ-on-chip · MEAGlass to 500×600mm
BUMPING, METALLIZATION & QUANTUM
UBM DepositionTi/Pt/Au · Ti/Ni/Au · Cr-based BLM · one pump-down with in-situ clean4-12″ + pieces
Gold Bump ServicesElectroplated and evaporated Au bumps 1-20 µm · TC / thermosonic / ACF ready4-12″
Indium Bump ServicesEvaporated In bumps to 10µm pitch · as-deposited flat-top · cold weld / TC ready4-12″
AuSn Bump Services80/20 AuSn multilayer PVD and plating · fluxless eutectic 278°C4-12″
AuGe & AuSi Die AttachStacked evaporation to eutectic ratio · 356°C / 363°C first-level attach4-12″ + backside
High-Pb Solder Bumps95Pb/5Sn · 97Pb/3Sn C4-class evaporated bumps · low-alpha Pb on request4-12″
SLID / TLP StacksCu/Sn · Au/In · Ag/In deposited couples · bond low, remelt high4-12″
Al-Ge Wafer-Level Sealing424°C eutectic seal frames on matched wafer pairs4-12″
Ohmic Contact MetallizationGaAs · GaN contact stacks · RTA alloying · TLM structures on request2-12″
Cryo & UHV MetallizationFluxless AuSn · Ti/Pd/Au · seal rings from ~20µm · AlN / SiC carriers4-12″ + carriers
Optical Access ComponentsDouble-side patterned windows · apertures · ~1µm-class meshes · unfilled TGV holesWafers + chip-scale
MEMS Vapor CellsDRIE cavity bodies · anodic / adhesive bonding · delivered unfilled4-12″ pairs
Thin-Film-on-InsulatorQuartz-on-Si below 570°C · custom LNOI · piezo films · 3-5 wafer lots4-6″
Development and evaluation services

Orderable deliverables for evaluation programs

Small-quantity deliverables for teams evaluating a process, a material, or an assembly route.

ServiceWhat it isDelivery
Patterned test wafersCMP and process evaluation substrates with your pattern and film stackFull wafers or diced coupons; delivered at the agreed process stage
Glass TGV couponsHole-only, seeded, lined, or filled vias; routed prototypesWafer or coupon format; customer pre-drilled glass reviewed
Microchannel cooling structuresEtched channels, bonded flow structures, heater and sensor test chipsOpen or bonded delivery; leak and pressure testing by agreement
Cu pillar and SnAg microbumpsPillars with SnAg caps and SnAg solder bumps on your pad stackAs-plated or reflowed; bumped wafers or diced dies
Laser submounts and optical benchesSi and AlN submounts, V-grooves, patterned metal, AuSn-ready padsBare, metallized, or solder-coated components

Start your project.
Initial response within one business day.

Share your process requirements, substrate, and production volume. A Nanosystems JP Inc. engineer will give an initial response within one business day. Full quote typically within 7-10 business days, subject to project complexity and NDA requirements.

To speed up technical review, please include:
substrate type & size  ·  target process  ·  quantity  ·  timeline  ·  design files if available (not required for first review)

sales@nanosystemsjp.co.jp · +81-3-5288-5569 · NDA available on request · Full quote within 7-10 business days · All data handled confidentially

Technical AI - Nanosystems JP Inc.
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